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Model SH series
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Specification
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Style
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SH-6
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SH-8
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SH-12
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Dimension
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L: 820mm*
W: 720mm*
H: 890mm
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L: 960mm*
W: 850mm*
H: 900mm
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L: 1300mm*
W: 920mm*
H: 920mm
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Weight (about)
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170KG
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230KG
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300KG
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Electricity Demand
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220VC, 50~60Hz
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Chuck
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Size & Rotation angle
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6", 360° Rotation
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8", 360° Rotation
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12", 360° Rotation
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X-Y Travel range
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6" * 6"
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8" * 8"
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12" * 12"
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Moving resolution
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1μm
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Sample fixed mode
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Vacuum adsorption
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Electrical design
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Electrical Floating with Banana plug adapter, can be used as a backside electrode
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Platen
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U shape platen
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6 micropositioners available
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8 micropositioners available
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12 micropositioners available
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Move range & adjustment mode
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Platen can be quickly lifted up and down 6mm for fast probe tip seperation
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Platen can be fine tuned up and down 25mm precisely with 1μm resolution
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Microscope
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Travel range
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X-Y axis : 2" * 2", Z axis : 50.8mm
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Moving resolution
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1μm
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Switching object lens
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Microscope tilting 30°manually by Lever
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Magnification
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20~4000X
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Lens specification
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Eyepiece: 10X ; Objective lens : 5X, 10X, 20X, 50X 、100X（option）
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CCD pixels
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50W (Analog) / 200W (Digital) / 500W (Digital)
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Micropositioner specification
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X-Y-Z Travel range
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12mm-12mm-12mm / 8mm-8mm-8mm
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Mechanical resolution
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10μm / 2μm / 0.7μm / 0.1μm
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Current leakage accuracy
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10pA / 100fA (with Shielding Box）
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Cable connectors
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Banana head / Crocodile clip / Coaxial / Triaxial
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Application
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Wafer test, Photoelectric device test, PCB / IC test, RF test, high voltage and high
current measurement etc.
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Optional Accessories
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Chuck quick roll out mechanism
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Microscope tilt mechanism (Tilting 30° manually by Lever )
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Microscope pneumatic lifting mechanism
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Laser repair with cutting,ablation and welding function
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Probe clamp
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Dark field of microscope / DIC / Normarski test, Light intensity / wavelength test
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IC hotspot detection by LC
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High voltage and high current measurement
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Hot chuck
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High/Low temprature chuck
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Shielding box
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Special adapter
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Vibration free table
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Gold-plated chuck
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Coaxial / Triaxial chuck
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Chuck quick move-out and fine adjustment mechanism
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Chuck rotation fine adjustment
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Light intensity / wavelength testing
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RF Testing
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Active probe
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Low current / Capacitance test
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Intergartion of intergral sphere
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Fixture for Fibre optic coupler test
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Fixture of Package IC test
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Fixture of PCB test
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Special Custom design
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Characteristics
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Stable structure, Platen can be quick lifted and fine-tuned, Suitable
for probe card installation and usage
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Comfortable large handle, Driver Screws: Zero back lash
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Compatible with high magnification metallographic microscope
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Internal circuit/ electrode/ PAD probe
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Suitable in University and Research laboratory
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LD/LED/PD Light intensity / wavelength testing
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Up to 12 inch wafer testing
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IV/CV Characteristic testing of materials / devices
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High precision lead screw drive structure, linear movement
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High frequency characteristic test of devices
(up to 300GHz frequency)
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